Reza Ghodssi
Associate Professor
Department of Electrical and Computer Engineering (ECE)
Institute for Systems Research (ISR)
University of Maryland, College Park
Ph.D., Electrical Engineering, University of Wisconsin at
Madison
- Expertise
- Micro-Electro-Mechanical Systems (MEMS)
Microsystems
Nanotechnology
Microfabrication Technologies
Microsensors
Microactuators,
Integrative Microsystems
Biosensing
Energy Harvesting
Credentials
Dr. Ghodssi is the Director of the MEMS Sensors and Actuators Lab (MSAL)
in ECE and ISR at the University of Maryland and a core faculty member in the Bioengineering Graduate Program
and the Maryland NanoCenter. His research interests are in the design and development of microfabrication technologies
and their applications to microsensors, microactuators, and integrative microsystems for biosensing and energy harvesting.
At Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process
for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT,
he developed the building block MEMS fabrication technologies for a microturbine generator device,
and also served as an Assistant Director on that project. At Maryland, his research group has pioneered
the development of next generation PowerMEMS devices using micro-ball bearing and MEMS-based gray-scale technologies
and the use of novel III-V optical MEMS devices and systems for chemical and biological detection.
His research has been funded by Army Research Lab (ARL), National Science Foundation (NSF), Laboratory for Physical Sciences (LPS)
of the National Security Agency (NSA), and NASA Goddard Space Flight Center (GSFC). He has served as a program co-chairman for
the 2001 International Semiconductor Device Research Symposium (ISDRS) and as a chairman of the MEMS and NEMS Technical Group
at the American Vacuum Society (AVS) from 2002 to 2004.
Dr. Ghodssi has over 50 scholarly publications and was recently selected as editor of the Handbook of MEMS Materials and Processes
to be published in 2008. He has received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award,
and the 2003 UMD Outstanding Systems Engineering Faculty Award. He is the co-founder of MEMS Alliance in the greater Washington area
and a member of the IEEE, AVS, MRS, ASEE and AAAS societies.
- Phone
- 301-405-8158
Address- 1357 A.V. Williams Building
University of Maryland
College Park MD 20742
Email- Click here to contact Dr. Ghodssi
For more information- MEMS Sensors and Actuators Lab page
- Dr.
Ghodssi's home page
- Ghodssi's
Electrical and Computer Engineering Department page
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